Temperature behaviour on deposition of the titanium nitride thin films on the H13 steel by the electric arc discharge in vacuum
AbstractObjective: In this present research work the behaviour of temperature of the substrate manufactured in AISI H13 steel, in the range of and , during of surface deposition of titanium nitride (TiN) thin films by the technique of cathodic arc in vacuum. Results: The physical properties of the TiN films were obtained and analysed by the techniques of micro-indentation, Atomic Force Microscopy (AFM) and X-Ray Diffraction (XRD). Conclusion: It was determined that the increase in the temperature of the substrate during the deposition of TiN films improves the mechanical properties of the surface of the steel of type AISI H13, where the highest hardness was present in the coating deposited at a temperature of , which has a preferential ori... Ver más
0122-820X
2422-5053
22
2017-07-01
14
22
info:eu-repo/semantics/openAccess
http://purl.org/coar/access_right/c_abf2
| Sumario: | AbstractObjective: In this present research work the behaviour of temperature of the substrate manufactured in AISI H13 steel, in the range of and , during of surface deposition of titanium nitride (TiN) thin films by the technique of cathodic arc in vacuum. Results: The physical properties of the TiN films were obtained and analysed by the techniques of micro-indentation, Atomic Force Microscopy (AFM) and X-Ray Diffraction (XRD). Conclusion: It was determined that the increase in the temperature of the substrate during the deposition of TiN films improves the mechanical properties of the surface of the steel of type AISI H13, where the highest hardness was present in the coating deposited at a temperature of , which has a preferential orientation in the plane determined by the XRD patterns.Keyword: Coatings, Metal substrates, Substrate temperatureResumenObjetivo: En el presente trabajo de investigación se estudia el comportamiento de la temperatura del sustrato, fabricado en acero de tipo AISI H13, en el rango de y , durante la deposición superficial de películas delgadas de nitruro de titanio (TiN) por la técnica de arco catódico en vacío. Resultados: Las propiedades físicas de las películas de TiN fueron obtenidas y analizadas mediante las técnicas la micro-indentación, microscopía de fuerza atómica (AFM) y la difracción de rayos x (DRX). Conclusión: Se determinó que el incremento en la temperatura del sustrato durante la deposición de las películas de TiN, mejora las propiedades mecánicas de la superficie del acero de tipo AISI H13, donde la mayor dureza se presentó en el recubrimiento depositado a una temperatura de , el cual tiene una orientación preferencial en el plano determinada por los patrones de DRX.Palabra Clave: Revestimientos, Sustratos metálicos, Temperatura del sustrato Resumo Objetivo: No presente pesquisa é estudado o comportamento da temperatura do substrato, feito de aço de tipo AISI H13, no intervalo de e , durante a deposição superfície das películas finas de nitreto de titânio (TiN) por meio da técnica de arco catico em vácuo. Resultados: As propriedades físicas dos filmes de TiN foram obtidos e analisados pelas técnicas de micro-indentação, microscopia de força atómica (AFM) e difracção de raios-X (DRX). Conclusão: determinou-se que o aumento de temperatura do substrato durante a deposição do filme de TiN, melhora as propriedades mecânicas da superfície do aço de tipo AISI H13, onde a maior dureza foi apresentada no revestimento depositado a uma temperatura de , que tem uma orientação preferida no plano determinados pelos padrões de DRX.Palavras-chave: Revestimentos, Substratos metálicos, Temperatura do sustrato
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| ISSN: | 0122-820X |